A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures.

Allard LF, Bigelow WC, Jose-Yacaman M, Nackashi DP, Damiano J, Mick SE. A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures. Microsc Res Tech. 2009 Mar; 72(3):208-15.

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subject areas

Micro-Electrical-Mechanical Systems
Microscopy, Electron
Nanoparticles
Semiconductors
Temperature
Thermodynamics

authors with profiles

Miguel Jose-Yacaman

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